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Howard Nanoscale Science and Engineering Facility

Director: Harris, Gary, Ph.D., P.E.

Summary:

Howard Nanoscale Science and Engineering Facility (HNF) occupies a specially renovated wing on the first floor of the Engineering Building.The five large laboratories cover ~6000 sq. ft. of space and the HNF has about 2000 sq ft of contiguous office space. The HNF is an established centralized user facility containing over $17M of micro- and nano fabrication and characterization equipment, accessible by external and internal academic, government and industrial users. Currently, HNF has integrated facilities in the following categories:

Lithography Facilities
Nanofabrication Facilities
Plasma Etching / Deposition Facilities
CVD Deposition Facilities (SiC,GaN)
Nanomembrane Facilities
Characterization Facilities
Computer Facilities
Societal and Ethical Issues

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Last updated: 2012-09-13T08:35:02.660-05:00

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